Features and Benefits:
The LEXT provides superior imaging and measuring performance with the simplicity of single touch operation. The versatility of the system provides all of the microscopy techniques combined with the added power of confocal so that any sample can be accommodated with no sample preparation or lost time.
- New Dual Confocal System – allows for quick operation with no intensity adjustment
The LEXT OLS4000 employs a newly developed dual confocal system. Thanks to the inclusion of a dual confocal optical system, the LEXT OLS4000 can capture a clear image from a specimen consisting of materials with extremely varied reflectivity levels.
- Accuracy and Repeatability – Traceability for added process control
The LEXT OLS4000 is the first Laser Microscope to provide both accuracy and repeatability guarantees.
Z Repeatability 50x: σn-1=0.012 μm
XY Repeatability 100x: 3σn-1=0.02 μm
Z Accuracy 0.2+L/100 μm or Less (L=Measuring Length μm)
XY Accuracy Measurement Value ±2%
- 85-Degree Slopes – image and measure on near vertical surfaces
Thanks to dedicated objective lenses with high numerical apertures and a dedicated optical system that obtains maximum performance from the 405 nm laser, the LEXT OLS4000 can reliably measure acute-angled specimens that were previously impossible to measure.
- New Roughness GUI – the versatility of an interferometer and a stylus without limitations
The LEXT OLS4000 has a new roughness-specific mode enabling roughness profile measurement for sample lengths up to 100 mm with the new automatic line stitching function.
The LEXT OLS4000 has been developed to represent a new standard of surface roughness measuring tool. This system is calibrated in the same way contact surface roughness gauges are calibrated, and has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement.
- Stitching Capability – Capture your whole region of interest
Higher-magnification imaging generally narrows the visual field range. The advanced stitching function of the OLS4000 enables you to stitch up to 500 images together to create a high-resolution, wide-field image. Additionally, 3D display and 3D measurements are available on the stitched image.
- Outstanding resolving power – resolve features with no specimen preparation
The 405nm laser diode is combined with specially designed optics to provide optimized image quality and minimized aberrations. The resolving power is enhanced by confocal optics featuring an optimized circular pinhole and a high speed XY scanner developed from Olympus MEMS technology. The result is world leading spatial resolution that clearly resolves patterns of 0.12µm line-width.
The LEXT OLS4000 is able to provide a new level of Z resolution as well. The system is capable of 0.8 nm scale resolution and 1.0 nm display resolution.
- Simultaneous 3D and "true color" image acquisition – get the whole view of your sample
A unique feature of LEXT is its ability to image samples in 3D and "true color" by combination of the laser image with the full color brightfield image using the systems unique software capabilities. In addition, DIC can also be combined with the confocal image to provide identification of minute level differences on the surface of a specimen.
- Auto-Threshholding – faster measuring time with no added adjustments
The OLS4000 is equipped with an auto-thresholding function for laser intensity. System will automatically examine the sample and determine the optimum laser and white light intensity for the sample. This provides optimal imaging and the elimination of operator error.
- Seven Measurement Modes to meet all your metrology requirements. – Versatile measuring functions to accommodate all specimens
Step Measurement, Surface Roughness Measurement, Area/Volume Measurement, Particle Analysis, Geometric Measurement, Thin Film Measurement and Auto Edge Detection Measurement
- User Defined Reports – Reports in your format
Fast production of easy-to-understand reports is vital to metrology instrument. The LEXT OLS4000 generates a measurement report with one click. It is also provided with an edit function to allow the operator to customize each template.
- 10. Ease of Use – Spend time innovating not operating a machine
For quick and easy operation by new operators, the LEXT OLS4000 has a detailed user designed wizard function. This wizard function eliminates the time spent reading the manual and lengthy training sessions.
In addition for optimal operation, Olympus has successfully preset a skilled operator''''s criteria in the system based on experience accumulated over Olympus''''s 90 year history. Much of this is attributable to the INR (Intelligent Noise Reduction) algorithm newly installed on the LEXT OLS4000. This algorithm allows even a new operator to easily obtain an image identical to that of an expert.
- New Roughness GUI – the versatility of an interferometer and a stylus without limitations
The LEXT OLS4000 has been developed to represent a new standard of surface roughness measuring tool. This system is calibrated in the same way contact surface roughness gauges are calibrated, and has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement.
The LEXT OLS4000 has a new roughness-specific mode enabling roughness profile measurement for sample lengths up to 100 mm with the new automatic line stitching function.
- Motorized Nosepiece – protect your valuable samples
The LEXT OLS4000 is equipped with a motorized revolving nosepiece as standard to prevent contact with a specimen during an objective lens change. When a new lens is selected, the revolving nosepiece automatically retracts to avoid contacting the specimen. At the same time, the revolving nosepiece automatically brings the objective lens into focus along with image alignment and adjusts light intensity, allowing stress-free switchover of magnifications.
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